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Temperature-related problems are avoided with this dry pump

| By Chemical Engineering

This company has expanded its iXH family of harsh-process dry pumps with the introduction of the iXH500H Series. This new series of 500-m3/h pumps has been optimized for flat-panel, solar and advanced semiconductor processes that require high gas flows and flexible pump-temperature profiles. Running at low temperatures, the iXH500H series is beneficial for processes that use high flows of corrosive gases, or for processes with thermally sensitive precursors that could “plate out” byproducts within the pump. High operating temperatures can be used where the risk of condensation of byproducts within the pump exists. The iXH500H, with this increased temperature pump temperature flexibility, can reduce the pump-energy consumption by up to 15%. As a result, the new pump may yield a 20–30% lower cost of ownership as compared to previous-generations iXH dry pumps, says the company. — Edwards Ltd., Crawley, U.K.

www.edwardsvacuum.com