The VersaSpec MB2 and MB3 systems are two- and three-stage molecular-beam inlet, quadrupole mass-spectrometer systems designed for analysis of neutrals or ions across the pressure range from 2 mTorr up to 2 atm. These systems are suitable for plasma diagnostics, chemical vapor deposition and other similar applications. The MBx system is a three-stage, discretely pumped, gas-analysis system for extreme samples. It is designed with a heated inlet, easily changed first aperture and skimmer, and an isolation gate valve — features that allow easy inlet maintenance for applications such as pyrolysis, which have challenging sample conditions. — Extrel CMS LLC, Pittsburgh, Pa.
Mass spectrometers with extreme inlets
| By Chemical Engineering