Mobile Navigation

Automation & Control

View Comments

Mass flowmeters for controlling high-purity gas flows

| By Chemical Engineering

Bronkhorst High-Tech

These metal-sealed mass flowmeters/controllers (photo) are designed to meet the requirements of the semiconductor market and other high-purity gas applications. The devices feature high surface quality and are of modular construction with metal-to-metal seals for long-term tightness. Now, as an alternative to traditional face-seal fittings, optional downport connections (c-seal and w-seal) are offered to reduce mounting space and facilitate installation and maintenance. Metal-sealed units are supplied in ranges from 0.1–5 cm3/min up to 0.6–100 L/min (or higher on request). — Bronkhorst High-Tech, Ruurlo, Netherlands

www.bronkhorst.com.