GEMÜ
A new motorized control valve for the semiconductor industry
The 2/2-way diaphragm globe valve C53 iComLine (photo) was developed for precise and demanding control applications in semiconductor production. The sealing concept of the valve is based on the company’s PD design, with actuator and medium separated by a regulating cone made of resistant polytetrafluoroethylene (PTFE). As the regulating cone contour, actuator stroke and connection size can be customized, the C53 iComLine satisfies virtually all control and flow requirements of the high-tech semiconductor industry. Thanks to the combination of the precise stepper motor with ultra-pure body materials, the valve is particularly suitable for lithography, CMP and etching processes, as well as applications in the analysis field of any semiconductor production process. — GEMÜ Valves, Inc., Atlanta, Ga.