Edwards
Reduce chemical condensation in semiconductor operations
The Smart Thermal Management System (TMS) is designed for process operators carrying out chemical vapor deposition (CVD), epitaxy, oxide etch and poly etch processes, which have the potential for chemical vapors to condense and deposit in exhaust lines. The system maintains desired gas temperatures in vacuum pump inlet and exhaust lines. Unheated lines are susceptible to both clogging by condensed process materials and byproducts and potential corrosion resulting from such unwanted deposition. The Smart TMS includes temperature monitoring within the heating elements, enabling feedback control to accurately maintain exhaust temperature at a specified setpoint. This is said to reduce downtime and risks to service personnel, who are tasked with cleaning out these often hazardous materials, says the company. — Edwards, Burgess Hill, U.K.